发明名称 Piezo actuator
摘要 A piezoelectric actuator is provided with a multilayer construction of piezoelectric layers perpendicular to the action direction, with inner electrodes located between the piezoelectric layers, which can be subjected to an electrical voltage via outer electrodes. At further piezoelectric layers with inner electrodes, an electrical sensor signal that is proportional to the actuation of the piezoelectric actuator can be picked up via further outer electrodes. The piezoelectric layers for the actuator part and the piezoelectric layers for the at least one sensor part are integrated in one component as a piezoelectric actuator, in such a way that individual piezoelectric layers for the sensor part are located at predetermined spacings or also side by side between the piezoelectric layers for the actuator part.
申请公布号 US2006255695(A1) 申请公布日期 2006.11.16
申请号 US20050550932 申请日期 2005.09.28
申请人 ENDRISS AXEL 发明人 ENDRISS AXEL
分类号 H01L41/083;H01L41/047 主分类号 H01L41/083
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