| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixing structure of a housing side sealing ring of contamination-free rotary equipment enabling to take severe contamination measures. SOLUTION: On a shaft passing wall part 20 of a housing 21, a fluorine resin coating layer 2d continued to a fluorine resin coating layer 2a on an inner surface of the housing is coated and formed to make a circular plane, which is a fixed surface 25 provided for the fixing structure orthogonally to a rotation shaft 22, and a circular metal seal flange 3 with a working face 3e formed attaching to an outer diameter side part 25a of the fixed surface 25 is mounted so as to be freely fastened in a shaft line direction with the housing side sealing ring 4 internally engaged and held. When the seal flange 3 is fastened on the shaft passing wall part 20 so that the working face 3e attaches to the outer diameter side part 25a of the fixing surface 25, thereby, the housing side sealing ring 4 is secondarily sealed by an O-ring 32, and is fixed on the shaft passing wall part 20. COPYRIGHT: (C)2007,JPO&INPIT
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