摘要 |
A precision surface plate comprising: a hollow casing (120) having a reference plane (121) used as a surface on which either or both of a workpiece and mechanical equipment (124) are placed; a honeycomb structure (112), which is a collection of almost identically-shaped enclosed cells (116), disposed inside the casing; and a heat transfer device (122) provided in the honeycomb structure to allow cells of the honeycomb structure to communicate with each other and transfer heat; heat being transferred effectively between the cells of the honeycomb structure through the heat transfer device. |