发明名称 |
Pressure transducer for gaseous hydrogen environment |
摘要 |
A silicon-based hydrogen pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate that shields the cavity formed by the silicon membrane and cell body from hydrogen permeation. A bossed container filled with an oil material is mounted on the substrate and houses a sensor cell. The oil material may be impregnated with a hydrogen getter material. |
申请公布号 |
EP1722209(A1) |
申请公布日期 |
2006.11.15 |
申请号 |
EP20060075914 |
申请日期 |
2006.04.19 |
申请人 |
DELPHI TECHNOLOGIES, INC. |
发明人 |
BETZNER, TIMOTHY M. |
分类号 |
G01L9/00;G01L19/14 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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