发明名称 |
METHOD AND APPARATUS FOR IN-LINE PROCESS CONTROL OF THE CIGS PROCESS |
摘要 |
An in-line production apparatus and a method for composition control of copper indium gallium diselenide (CIGS) solar cells fabricated by a co-evaporation deposition process. The deposition conditions are so that a deposited Cu-excessive overall composition is transformed into to a Cu-deficient overall composition, the final CIGS film. Substrates with a molybdenum layer move through the process chamber with constant speed. The transition from copper rich to copper deficient composition on a substrate is detected by using sensors which detect a physical parameter related to the transition. A preferred embodiment sensors are provided that detect the composition of elements in the deposited layer. A controller connected to the sensors adjusts the fluxes from the evaporant sources in order provide a CIGS layer with uniform composition and thickness over the width of the substrate. |
申请公布号 |
EP1721339(A1) |
申请公布日期 |
2006.11.15 |
申请号 |
EP20050722187 |
申请日期 |
2005.03.04 |
申请人 |
SOLIBRO AB |
发明人 |
STOLT, LARS;KESSLER, JOHN |
分类号 |
H01L31/04;H01L;H01L31/032 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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