| 摘要 |
A self-adjusting apparatus for a transfer system is provided to automatically regulate the inclination of a substrate/carrier by preventing generation of a gap between the substrate/the carrier and a guide. A substrate transfer apparatus includes a drive section, drive rollers(14,15), and right and left guides(12,13). The drive section includes a drive source for transferring a substrate/carrier. The drive rollers are connected to the drive section and are installed at lower portions of a path along which the substrate/carrier is transferred to the right and left sides in a row to transfer the substrate/carrier. The guides are installed on the right and left sides of the transfer path of the substrate/carrier to guide the substrate/carrier. The right and left guides are tension guides for preventing inclination of the substrate/carrier by using a resilient member.
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