CONTAINER FOR HOUSING A MASK BLANK, METHOD OF HOUSING A MASK BLANK, AND MASK BLANK PACKAGE

摘要

A mask blank storing container, a mask blank storing method and a mask blank package are provided to remove completely unwanted chemical materials by using a heat treatment. A mask blank with a chemical amplification type resist layer is stored in a storing member(5). Heated pure water is supplied to the storing member. A predetermined chemical material is then removed from the storing member, wherein the predetermined chemical material is capable of restraining a chemical amplification effect of the chemical amplification type resist layer. The predetermined chemical material removing process is performed on the storing member by using a heat treatment.