APPARATUS FOR CACHING BY-PRODUCTS IN SEMICONDUCTOR APPARATUS

摘要

An apparatus for collecting byproducts of a semiconductor device is provided to more rapidly cool reaction byproducts by including a dual structure of a cooling pipe. A housing(110) has a gas inflow port and a gas outflow part, including an inner path through which exhaust flows. A cooling tower is installed in the housing. A trap module(130) is installed in the housing wherein a plurality plates for collecting reaction byproducts are formed on the trap module. A cooling member for cooling the housing and the cooling tower is included.