| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a micro-electron source device having proper electron emission characteristics, without making bright spots generated on a display, using a simple method. <P>SOLUTION: This manufacturing method for a micro-electron source device comprises a cathode electrode forming process for forming a cathode electrode 11 on a support substrate 10, a composite layer forming process for forming a composite layer 12L, wherein a carbon material 12a is embedded in a conductive matrix 12b on the cathode electrode 11, and a micro-electron source layer forming process for exposing a part of the carbon material 12a to the surface of the composite layer 12L, by removing the matrix 12b of an upper part of the composite layer 12L for forming a micro-electron source layer 12. The micro-electron source layer forming process comprises a process for removing the matrix 12b of the upper part of the composite layer 12L, by making a resin layer La having conductivity and adhesiveness contact the composite layer 12L, then, peeling off the resin layer La. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
