发明名称 MASK FOR VAPOR DEPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition mask for forming an electrode film having a region whose circumference is perfectly closed by the electrode and where the electrode film is not formed is formed at the inside of the film face. SOLUTION: In the mask for vapor deposition, a first mask part constituting the outside profile part of a mask pattern and a second mask part constituting the inside profile part of the mask pattern are connected by at least one bridge part which is thinner than the first mask part and the second mask part and which connects them in a form of forming a gap on a space with the surface of the work, when the mask is arranged on the surface of a work. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006307282(A) 申请公布日期 2006.11.09
申请号 JP20050131042 申请日期 2005.04.28
申请人 KYOCERA KINSEKI CORP 发明人 IIDA HIROAKI;TAKAHASHI ATSUYA
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
主权项
地址