| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the number of layers and layer structure of a multilayer film in which the simulation result based on a design of an optical component matches the film formation result. <P>SOLUTION: A reflection mirror 1 as the disclosed optical component is constituted in such a way that on an optical substrate 2, the multilayer film 3 is formed in which pairs of high refractive index films 4a, 4b and low refractive index films 5a, 5b are layered by 22-30 layers, the uppermost layer is made to be a low refractive index layer 5a and a physical film thickness of the low refractive index layer 5a as the uppermost layer is set to be 100 nm to 127 nm. <P>COPYRIGHT: (C)2007,JPO&INPIT |
