| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for forming a functional film pattern which can form a film pattern uniform in the depth direction without being made large-sized, and to provide a method for forming the functional film pattern and electronic equipment. SOLUTION: A cylindrical lens 52 is provided in a laser beam irradiation head 24. Droplets 30 are discharged from a droplet discharge head 23 to form the film pattern 40A having a prescribed form and the advancing direction of a laser beam is changed by the cylindrical lens 52 so that the laser beam is made incident on each position on the outside surface of the film pattern 40A in the normal direction. COPYRIGHT: (C)2007,JPO&INPIT
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