| 摘要 |
PROBLEM TO BE SOLVED: To provide a foldaway film sheet extension method and an expander for foldaway film sheet in which a mounting region of a wafer in a film sheet is expanded with a simplified constitution/method, and other remaining regions are folded while the mounting region is left behind and expanded as it is, and a wafer ring is usable also in later processes. SOLUTION: In the foldaway film sheet extension method and the expander for foldaway film sheet, only the mounting region 11a with a chip 13 mounted thereon is fixed while having been expanded, and a driver 300 rotates a stage and an elevation apparatus 200 lowers an extension stage 100 to fold the remaining regions other than the mounting region 11a while twisting the remaining regions and so form a folded region 11b. Further, the foldaway region 11b of the film sheet 11 is solidified, and the foldaway region 11b keeps the mounting region 11a in an extended state. COPYRIGHT: (C)2007,JPO&INPIT |
