| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator which can control the operation with an arbitrary driving force at an object like a mirror, and to provide an optical device having the actuator, etc. SOLUTION: The actuator includes the object 30 having a base 20, a body part 11, and a holding part 13 which movably holds the body part 11 to the base 20; a movable comb tooth part 60 extended in a direction which is substantially orthogonal to the forming direction of the holding part 13 from the object 30 side, and a fixed comb tooth part 80 extended in a direction substantially orthogonal to the forming direction of the holding part 13 from the base 20, and arranged in the position which opened spacing in the movable comb tooth part 60. The fixed comb tooth part 80 is constituted by a normal voltage giving comb tooth section 80A to which a driving voltage is applied regularly, and a variable voltage giving comb tooth section 80B for regulating and applying the voltage. COPYRIGHT: (C)2007,JPO&INPIT
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