| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide the dielectric layer of a nano-composite which is excellent in a leak current characteristic so as to be adopted in different capacitors including a concave structure, and to obtain a high dielectric constant; and to provide the capacitors having the dielectric body, and its manufacturing method. <P>SOLUTION: The dielectric layer for the capacitor includes the dielectric layer of the nano-composite which is obtained by mixing HfO<SB>2</SB>with the dielectric layer (the dielectric constant to be selected from ZrO<SB>2</SB>, La<SB>2</SB>O<SB>3</SB>, and Ta<SB>2</SB>O<SB>5</SB>is 25-30, and band gap energy is 4.3-7.8), which has a relative permittivity at least the same as that of HfO<SB>2</SB>in the form of the nano-composite. Consequently, an effect is obtained to manufacture the capacitor having the high dielectric constant, while securing the leak current characteristic without the loss of the dielectric constant regardless of a relatively thin thickness. <P>COPYRIGHT: (C)2007,JPO&INPIT |
