发明名称 FINE PATTERN-FORMED PLASTIC FILM AND METHOD OF FORMING EMBEDDED FINE PATTERN
摘要 PROBLEM TO BE SOLVED: To provide a fine pattern-formed plastic film in which, an embedded fine pattern having a cycle of 400 nm or less can be easily prepared, and an optical element having satisfactory precision and causing no pattern collapse such as a fine protruded pattern due to an external pressure can be provided particularly when forming an embedded fine pattern to a transparent plastic film at one time. SOLUTION: In the embedded fine pattern-forming method, a thin film is formed on the plastic film, a heated raw board, on which a fine rugged pattern is formed, is pressed against the thin film, and the thin film is depressed into a plastic film inner part by means of protruded parts of the heated raw board. Then, the thin film portion which corresponds to recessed parts of the raw board and is not depressed is removed. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006308668(A) 申请公布日期 2006.11.09
申请号 JP20050128167 申请日期 2005.04.26
申请人 RICOH CO LTD 发明人 KATSURAGAWA TADAO
分类号 G02B5/18;B29C59/02;B81C99/00;G02B5/30;H01L21/027 主分类号 G02B5/18
代理机构 代理人
主权项
地址