| 摘要 |
PROBLEM TO BE SOLVED: To realize high-resolution gas flow measurement, and to prevent misdetection in flow measurement due to fluctuations in gas supply pressure, vibration, or impact. SOLUTION: Magnets 6 are disposed one for each of domains obtained by equally dividing a unit flow quantity into twelfths. In one domain among the domains with the magnets 6 disposed therein, a magnet unit 7 having a spot with no magnet 6 disposed therein, and flow sensors 8a and 8b, are provided so as to face on a passage position of the magnets 6 for output flow signals "a", each time the magnets 6 pass therethrough. While the flow sensor 8a outputs the flow signal "a" once, the flow sensor 8b outputs a flow signal "b" two times. Then, the flow sensor 8a is decided as having passed a domain having no magnet 6, that is, that it is a gas flow of unit flow quantity. Furthermore, high resolution measurement of 1/12 of a measured volume can be performed by using the flow signals "a" and "b". COPYRIGHT: (C)2007,JPO&INPIT
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