| 摘要 |
PROBLEM TO BE SOLVED: To provide a device of inspecting an angular velocity sensor capable of inspecting a large number of angular velocity sensors efficiently at short times. SOLUTION: The device is equipped with an external force additional section deploying a plurality of angular velocity sensors S1 to S24 and adding external force to the angular velocity sensor, a wiring relaying section prepared at the external force additional section, and an inspecting section. In order to drive the angular velocity sensors S1 to S24, by partitioning a plurality of angular velocity sensors S1 to S24 into a plurality of groups and selecting any one of the angular velocity sensors S1 to S24 within each group by a sensor selecting section 20 including the multiplexers M1 to M3 and the switches SW1 to SW6 arranged at the wiring relaying section, the sensor outputs Vout1 to Vout3 of the angular velocity sensors S1 to S24 selected from each group are output from the output terminal of the wiring relaying section. COPYRIGHT: (C)2007,JPO&INPIT
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