| 发明名称 |
Dual pulsed beam laser micromachining method |
| 摘要 |
A method is described for laser scribing or dicing portions of a workpiece using multi-source laser systems. In one embodiment, a first laser melts portions of the workpiece prior to a second laser ablating the portions of the workpiece.
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| 申请公布号 |
US2006249816(A1) |
申请公布日期 |
2006.11.09 |
| 申请号 |
US20050123675 |
申请日期 |
2005.05.05 |
| 申请人 |
INTEL CORPORATION |
发明人 |
LI ERIC J.;VORONOV SERGEI L.;RUMER CHRISTOPHER L. |
| 分类号 |
H01L29/06;B23K26/00;H01L21/78 |
主分类号 |
H01L29/06 |
| 代理机构 |
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