| 摘要 |
PROBLEM TO BE SOLVED: To suppress occurrence of damage of a front substrate and a back substrate to improve a yield; and to reduce a cost by forming a relatively simple structure. SOLUTION: When the front substrate 41 and the back substrate 48 are inserted between both contact plates 59, 59, and each contact plate 59 is pressed against the front substrate 41 (back substrate 48) by receiving pressing force from a corresponding weighting part by the opening of a spring part 58, each contact plate 59 is rotatively displaced such that the whole area of a flat contact surface thereof contacts a surface of the front substrate 41 (back substrate 48) regardless of the attitude and the level of opening of a spring part 58 because each contact plate 59 can be independently displaced to a certain extent without perfectly following displacement or deformation of the spring part 58. Thus, the parallel form of both the contact plates 59, 59 is kept, and the front substrate 41 and the back substrate 48 are evenly pressed. COPYRIGHT: (C)2007,JPO&INPIT
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