| 摘要 |
PROBLEM TO BE SOLVED: To provide a high dielectric capacitive element capable of improving design latitude and being miniaturized, and to provide its manufacturing method. SOLUTION: A lower electrode 103 composed of Ti/Pt is formed in a prescribed region on a protective insulation film 102. A high dielectric thin film 104 composed of SrTiO<SB>3</SB>in the same shape and the same size as the outer periphery of the lower electrode 103 is formed on the lower electrode 103. Further, on the high dielectric thin film 104, an upper electrode 105 is formed as composed of Pt in the same shape and the same size as the outer periphery of the high dielectric thin film 104. In this case, in the prescribed region of the upper electrode 105 and the high dielectric thin film 104, a contact window 100a is formed for electrically contacting the lower electrode 103 later. COPYRIGHT: (C)2007,JPO&INPIT
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