发明名称 Environment holding apparatus and environment control type analyzer
摘要 An environment holding apparatus includes: a first chamber that has an opening and holds a sample; a moving stage that is two-dimensionally moved with the first chamber being mounted thereon; and a first plane that includes an introduction port having a function of introducing gas adjusted to predetermined conditions into the first chamber from a pipe, and that is provided so as to cover the opening of the first chamber. The first plane is provided so as to be kept stationary regardless of a movement of the moving stage and the opening of the first chamber is two-dimensionally moved along the first plane by the movement of the moving stage.
申请公布号 US2006245976(A1) 申请公布日期 2006.11.02
申请号 US20060388201 申请日期 2006.03.24
申请人 NIKON CORPORATION 发明人 KAWAHITO TAKASHI
分类号 G01N33/00;G01N21/27 主分类号 G01N33/00
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