| 摘要 |
An apparatus for manufacturing a semiconductor with robot arms is provided to enable a user to inspect positions of the robot arms in real time by using sensors. An apparatus for manufacturing a semiconductor with robot arms includes a wafer cassette(100), the robot arm(130), and a driving shaft(135). Plural wafers are mounted on the wafer cassette. The robot arm loads or unloads the wafer in or out of the wafer cassette. The driving shaft actuates the robot arm. The robot arm has a first and a second surface. Position detection sensors(140,141), which detect a distance between the surface of the robot arm and the wafer surface, are formed on at least one of the first and the second surface.
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