| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of equipment formed by firmly coupling a light transmissive member to a substrate and having high reliability for a long use, related to the apparatus constituted by sticking the light transmissive material, such as a reaction tank window mounted to a reaction chamber of a biochemical blood analyzing apparatus or a flow cell of a liquid chromatograph, to another member. SOLUTION: The manufacturing method of equipment constituted by sticking the light transmissive material to the substrate comprises a step of setting the flatness of the joint surface of the substrate to the light transmissive member atλ(0.633μm) or lower and setting the surface roughness of the joint surface to 100 nm or less in square root mean roughness RMS, a step of heating/degassing the both at about 500°C in vacuum, and a step of performing thermal diffusion processing at 1000-1100°C in the atmosphere. COPYRIGHT: (C)2007,JPO&INPIT
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