发明名称 |
Auxiliary electrode encased in cation exchange membrane tube for electroplating cell |
摘要 |
A method and apparatus for plating a metal onto a substrate. One embodiment of the invention provides an apparatus for electrochemically plating a substrate. The apparatus comprises a fluid basin configured to retain a plating solution therein, an anode assembly disposed in the fluid basin, a substrate support member configured to support the substrate and contact the substrate electrically, and an encased auxiliary electrode assembly disposed in the fluid basin. The encased auxiliary electrode assembly generally comprises an auxiliary electrode disposed in a protective tube.
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申请公布号 |
US2006243598(A1) |
申请公布日期 |
2006.11.02 |
申请号 |
US20060362432 |
申请日期 |
2006.02.24 |
申请人 |
SINGH SARAVJEET;HAFEZI HOOMAN;BIRANG MANOOCHER;ROSENFELD ARON;BEHNKE JOSEPH |
发明人 |
SINGH SARAVJEET;HAFEZI HOOMAN;BIRANG MANOOCHER;ROSENFELD ARON;BEHNKE JOSEPH |
分类号 |
C25D3/56 |
主分类号 |
C25D3/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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