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发明名称
CONTINUOUSLY VARYING OFFSET MARK AND METHODS OF DETERMINING OVERLAY
摘要
申请公布号
EP1716389(A2)
申请公布日期
2006.11.02
申请号
EP20050723303
申请日期
2005.02.17
申请人
KLA-TENCOR TECHNOLOGIES CORPORATION
发明人
ADEL, MICHAEL, E.;SELIGSON, JOEL, L.;KANDEL, DANIEL
分类号
G01B11/00;G03F7/00;G03F7/20;H01L21/66;H01L21/76;H01L23/544
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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