发明名称 INTERFEROMETER AND FOURIER SPECTRAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an interferometer and a Fourier spectral device using the same capable of suppressing decrease in interference efficiency or visibility by specifying interference light causing the decrease in interference efficiency or visibility and by removing the specified interference light. SOLUTION: Wavefront images of the interference light generated by a beam splitter 3 are successively imaged by a detector 14. The phase difference of an interference light wave for each of a plurality of divided regions (regionsα,β,γ) in the successive wavefront images is calculated on the basis of the imaged successive wavefront images. The synchronization property of the interference light wave for each of the plurality of divided regions is determined on the basis of the calculated phase difference. A transmission limiter 6 making only the interference light of the generated prescribed phase be transmitted is controlled so that only the interference light determined to be the same phase is transmitted. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006300792(A) 申请公布日期 2006.11.02
申请号 JP20050124503 申请日期 2005.04.22
申请人 KOBE STEEL LTD 发明人 TAKAHASHI EIJI;TAKAMATSU HIROYUKI;AMANAKA MASAHITO;SAKOTA HISAKAZU
分类号 G01J3/45;G01B9/02 主分类号 G01J3/45
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