| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape variable mirror which can enlarge deformable amount of a mirror part without enlarging an outside form in the shape variable mirror which deforms a mirror plane. <P>SOLUTION: In the shape variable mirror 1 which deforms the mirror plane, piezo-electric elements 4 are held between a supporting substrate 2 and a mirror part 3, and four pieces are symmetrically located in the crosswise directions on the supporting substrate 2. Moreover, the piezo-electric elements 4 are cemented to the mirror part 3, and have both functions of deforming the mirror part 3 by being driven and fixing the mirror part 3 to the supporting substrate 2. A supporting part 5 is arranged inside each piezo-electric element 4. This configuration makes it possible to convert small movements of the piezo-electric elements 4 into a large movement of the mirror part 3 during driving the piezo-electric elements 4. <P>COPYRIGHT: (C)2007,JPO&INPIT |
