| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive capacitance type humidity sensor having an interdigital electrode type humidity sensor element and its manufacturing method capable of uniformly forming a moisture sensitive film of a uniform film thickness covering a pair of interdigital electrodes, stably and accurately measuring humidity, and reducing costs. SOLUTION: The humidity sensor element 11 comprises the pair of interdigital electrodes 11a and 11b and the moisture sensitive film 4r formed in such a way as to cover the interdigital electrodes 11a and 11b via an insulating film 3 and having a dielectric constant which changes according to humidity. The height h2 of the surface of the insulating film 3 on a prescribed closed path A surrounding the interdigital electrodes 11a and 11b is set higher than the height h1 of the surface of the insulating film 3 on the interdigital electrodes 11a and 11b. The moisture sensitive film 4r has a height equal to or lower than the height h2 of the surface of the insulating film 3 on the closed path A and is formed inside the closed path A in the capacitance type humidity sensor 101. COPYRIGHT: (C)2007,JPO&INPIT
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