| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring apparatus capable of eliminating a motion error of a scanning system used for a scanning operation. SOLUTION: The surface shape measuring apparatus comprises a rotatable spindle 112 and a linear-movable slide 142 constituting the scanning system and displacement sensors disposed on the slide 142. A sample to be measured 120 and an auxiliary sample 114 disposed in its periphery are rotated by the rotatable spindle 112. A displacement probe 132 which is used for measuring a shape of the sample to be measured, and two displacement sensors 134, 136 which are disposed on both sides of the displacement probe 132 and can measure a surface shape of the auxiliary sample 114 and the motion error of the scanning system, are arrange on the linear-movable slide 142 which moves on a straight line. Two points of the auxiliary sample 114 disposed in the periphery of the sample are measured by the displacement sensors 134, 136, and its surface shape is acquired, thereby enabling errors of a straightness error of the linear-movable slide 142, a rotational motion error of the rotatable spindle 112 and systematic errors caused by thermal expansion and the like to be all eliminated. COPYRIGHT: (C)2007,JPO&INPIT
|
