| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a nozzle plate comprising an ink repellent film and a reinforcing member. SOLUTION: The manufacturing method includes a process of forming a resist film for formation of a nozzle substrate on an electroforming matrix, a process of forming a resist body for formation of the nozzle substrate, a process of forming an electroforming metal film as the nozzle substrate 2 at a part of the electroforming matrix where the resist body is not formed, a process of forming the ink repellent film 4 on the electroforming metal film as the nozzle substrate, a process of forming a resist film for formation of the reinforcing member on both the resist body for formation of the nozzle substrate and the ink repellent film, a process of forming a resist body for formation of the reinforcing member on the resist body for formation of the nozzle substrate, a process of forming an electroforming metal film as the reinforcing member 5 on the ink repellent film, and a process of removing the resist body for formation of the nozzle substrate and the resist body for formation of the reinforcing member. COPYRIGHT: (C)2007,JPO&INPIT
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