发明名称 IMAGE SENSOR FABRICATING METHOD
摘要 A method for fabricating an image sensor is provided to increase yield of a chip and improve an optical characteristic by avoiding a crack generated by a micro lens protecting layer when a wafer having an image sensor is sawed along a scribe line. A micro lens pattern is formed on a wafer. A micro lens protecting layer(301) is formed on the resultant structure. The micro lens protecting layer on a scribe region is selectively removed to control generation of crack in the micro lens protecting layer in a subsequent wafer sawing process. The scribe region and a corner of a main chip region are no-chrome processed to selectively etch the micro lens protecting layer.
申请公布号 KR20060113293(A) 申请公布日期 2006.11.02
申请号 KR20050036585 申请日期 2005.04.30
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 LEE, WON HO
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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