发明名称 |
IMAGE SENSOR FABRICATING METHOD |
摘要 |
A method for fabricating an image sensor is provided to increase yield of a chip and improve an optical characteristic by avoiding a crack generated by a micro lens protecting layer when a wafer having an image sensor is sawed along a scribe line. A micro lens pattern is formed on a wafer. A micro lens protecting layer(301) is formed on the resultant structure. The micro lens protecting layer on a scribe region is selectively removed to control generation of crack in the micro lens protecting layer in a subsequent wafer sawing process. The scribe region and a corner of a main chip region are no-chrome processed to selectively etch the micro lens protecting layer.
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申请公布号 |
KR20060113293(A) |
申请公布日期 |
2006.11.02 |
申请号 |
KR20050036585 |
申请日期 |
2005.04.30 |
申请人 |
MAGNACHIP SEMICONDUCTOR, LTD. |
发明人 |
LEE, WON HO |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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