| 摘要 |
A method of manufacturing a Field Emission Device (FED) having a Carbon NanoTube (CNT) emitter includes: forming an emitter hole to expose a cathode electrode in an insulating layer after sequentially forming the cathode electrode, the insulating layer, and a gate electrode; forming a sacrificial layer by patterning a photoresist until the cathode electrode in a lower part of the emitter hole is exposed after coating the photoresist to cover the gate electrode and the exposed portion of the cathode electrode; coating a CNT paste on the sacrificial layer to fill the emitter hole, and removing the sacrificial layer while simultaneously forming the CNT emitter in the emitter hole by firing the CNT paste.
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