PROCESS AND DEVICE FOR COATING DISK-SHAPED SUBSTRATES FOR OPTICAL DATA CARRIERS

摘要

In order to achieve greater flexibility with a relatively simple equipment for coating substrates for optical data carriers, a coating device is disclosed with 1 to n inlet/outlet apertures and 2 to n coating apertures in a vacuum transport chamber. A number of spraying cathode arrangements which corresponds to the number of coating apertures is provided on the wall of the vacuum transport chamber. The device can provide two to n substrates in parallel with substantially identical layers or with different layers. Moreover, it can provide substrates with two to n layers in a mass-production installation.