发明名称 METHOD OF FIXING CAPILLARY, CAPILLARY HOLDER, AND WIRE-BONDING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of fixing a capillary and a capillary holder which can suppress a change in position to hold the capillary, and also to provide a wire-bonding apparatus using the same. <P>SOLUTION: The capillary holder consists of a capillary installation hole 10 having nearly a regular triangular cross-sectional shape with a part containing one vertex removed wherein a nearly circular cross-sectional shape of the capillary 102a is inscribed; and a hole 10a for applying tightening force which is connected to the vertex-removed part of the capillary installation hole 10 and applies tightening force to the capillary by being narrowed in width when the capillary 102a is inserted into the capillary installation hole 10. The widthwise direction of the hole 10a for applying tightening force is nearly parallel to one side of the nearly regular triangle opposite to the vertex-removed part. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006302984(A) 申请公布日期 2006.11.02
申请号 JP20050119277 申请日期 2005.04.18
申请人 KAIJO CORP 发明人 TAKEMOTO TAKESHI
分类号 H01L21/60 主分类号 H01L21/60
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