| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of inspecting precisely the presence of a defect in a wiring pattern, as to an inspected object with the wiring pattern formed on a polycrystal substrate. SOLUTION: A lighting means is arranged to irradiate the inspected object 1 with light from a substantially horizontal direction, and a plurality of image data is acquired respectively under the conditions where a relative position between the inspected object and the lighting means is changed by a relative position changing means, by picking up images respectively with an imaging means. The respective image data are subjected to logical product operation by a logical product computing means 10, after the relative positions are conformed as to the obtained respective image data, to remove an influence of reflected light having strong directivity from a specified crystal of the polycrystal substrate 1a. COPYRIGHT: (C)2007,JPO&INPIT
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