发明名称 Surface roughness/contour profile measuring instrument
摘要 A surface roughness/contour profile measuring instrument capable of automatic movement of a pickup to a measurement position has been disclosed. The surface roughness/contour profile measuring instrument comprises a pickup and a pickup moving mechanism and measures the surface roughness or the contour profile of the surface of a work, and further comprises a movement information generation section for generating movement information necessary to move the pickup from the current position to the measurement position for detecting the height of a surface position on the work surface and a movement control section for relatively moving the pickup with respect to the work based on the movement information generated by the movement information generation section.
申请公布号 US2006243035(A1) 申请公布日期 2006.11.02
申请号 US20060406710 申请日期 2006.04.18
申请人 AOKI YUYA 发明人 AOKI YUYA
分类号 G01B5/28 主分类号 G01B5/28
代理机构 代理人
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