Halbleiterscheibehalter für Poliermaschine

摘要

The abrasive machine is capable of preventing deformation and bad abrasion of an abrasive cloth (51), maintaining flatness of an abrasive face (52) of an abrasive plate (50) and improving abrading accuracy. The abrasive machine comprises the abrasive plate (50) and a holding unit (10) for holding a work piece (12). In the holding unit (10) an inner head (20 has a first concave section (21). An outer head (30) has a second concave section (31). A holding plate (22) is provided in the first concave section (21). An elastic holding member (24) forms a first chamber (25). An outer enclosing member (30a) is provided to the outer head (30). An inner enclosing member (33) is provided between the outer enclosing member (30a) and the inner head (20). A pressing member (36) presses the abrasive face (52) of the abrasive plate (50) and encloses the holding plate (22). An elastic ring member (34) forms a second chamber (35). A pressurizing unit (28) pressurizes the chambers (25, 35) so as to press the work piece (12) and the pressing member (36) onto the abrasive face (52).