THIN FILM TRANSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF

摘要

A thin film transistor display panel, and a manufacturing method thereof are provided to stably ensure sufficient sustain capacity of a sustain capacitor by removing an organic passivation layer and leaving only an inorganic passivation layer between a pixel electrode and a sustain conductor layer forming a sustain capacitor in a double-layered passivation layer structure. A gate line is formed on a substrate(110). A gate insulating layer(140) is formed on the gate line. A first semiconductor is formed on the gate insulating layer. A data line(171) and a drain electrode are formed on the first semiconductor at least in part. A sustain conductor(177) is formed on the gate insulating layer. A first passivation layer(180p) is formed on the data line, the drain electrode, and the sustain conductor. A second passivation layer(180q) is formed on the first passivation layer, and has an aperture placed on the sustain conductor. A pixel electrode(190) is formed on the second passivation layer, is connected to the drain electrode, and overlaps the sustain conductor at the aperture.