发明名称 Stacked gate flash memory device and method of fabricating the same
摘要 A stacked gate flash memory device and method of fabricating the same. A cell of the stacked gate flash memory device is disposed in a cell trench within a substrate to achieve higher integration of memory cells.
申请公布号 US7129537(B2) 申请公布日期 2006.10.31
申请号 US20050076499 申请日期 2005.03.09
申请人 NANYA TECHNOLOGY CORPORATION 发明人 LIN CHI-HUI
分类号 H01L29/788;H01L21/8247;H01L27/115;H01L29/423 主分类号 H01L29/788
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