| 摘要 |
A system and a method for manufacturing a flat display device are provided to reduce the installation cost of the system and shorten the manufacture time, by adopting a dry cleaner, such as a plasma cleaner, instead of a high-priced excimer ultraviolet cleaner. A substrate is loaded on a loader(100). One or more cleaners(500) receive the substrate from the loader, and clean the substrate. A carrying-in unit(300) carries the substrate into the cleaners from the loader. A carrying-out unit(900) carries out of the substrate from the cleaners for the next process. The cleaners comprise a dry cleaner(510), such as a plasma cleaner. The dry cleaner includes a chamber, first and second electrodes provided in the chamber, and first and second dielectric respectively provided on the first and second electrodes. |
