| 摘要 |
A method for manufacturing a ZnO nano structure and a device using the ZnO nano structure are provided to obtain ZnO nano rods arranged to a direction by growing a two-dimensional ZnO layer on an upper end of one-dimensional ZnO nano rod. A substrate is charged into a chamber(S2). ZnO nano rods are grown on the substrate at 300‹C to 700‹C and under 0.1 Torr to 2 Torr pressure(S6). The ZnO nano rod is cooled in the natural temperature or 200‹C(S8). Oxygen is supplied to the ZnO nano rods at 300‹C to 700‹C and under 2 Torr to 10 Torr pressure(S10). A zinc oxide layer is grown on the ZnO nano rod at 300‹C to 700‹C and under 2 Torr to 6 Torr pressure(S12). The substrate is one of Glss, GaAs, Quartz, LiNbO3, LiTaO3, Si, SiC, SiO2, ZnO, MgZnO, sapphire, a metal layer, and GaN.
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