发明名称 |
Integrated electronic circuit for memory plan, has intermediate, metallization and stop layers, each made of dielectric materials in respective zones, where one material presents relative dielectric permittivity greater than that of other |
摘要 |
<p>The circuit has an intermediate layer (M0) placed between a surface (S0) of a substrate (100) and a metallization layer (M1), where the surface is covered by a stop layer (S10). Each of the intermediate, stop and metallization layers is constituted of two distinct dielectric materials in two zones, where the material in one zone presents a relative dielectric permittivity greater than that of the material in the other zone. An independent claim is also included for a method for fabricating an integrated electronic circuit.</p> |
申请公布号 |
FR2884968(A1) |
申请公布日期 |
2006.10.27 |
申请号 |
FR20050003958 |
申请日期 |
2005.04.20 |
申请人 |
STMICROELECTRONICS SA SOCIETE ANONYME |
发明人 |
SCHOELLKOPF JEAN PIERRE;ROCHE PHILIPPE;JAOUEN HERVE |
分类号 |
H01L27/11;H01L21/768;H01L21/8244 |
主分类号 |
H01L27/11 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|