| 摘要 |
PROBLEM TO BE SOLVED: To obtain reflected light, of which the quantity is suitable for the photographing of the surface of an inspection target performed in order to detect the surface flaw of the inspection target, from a wide range of the surface of the inspection target having a large curvature. SOLUTION: In this inspection method of the surface flaw of a small diameter pipe 10 being the inspection target constituted so that the small diameter pipe 10 is irradiated with light, the surface of the small diameter pipe 10 is photographed by an imaging camera to form an inspection target image 30 and the presence of the surface flaw of the small diameter pipe 10 is detected from the inspection target image 30, combination composite illumination of bright field illumination due to a first illuminator 113 and dark field illumination using the parallel lights due to a second illuminator 114 and a third illuminator 115 is applied to the region of the small diameter pipe 10 to be inspected. COPYRIGHT: (C)2007,JPO&INPIT
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