| 摘要 |
PROBLEM TO BE SOLVED: To provide a drier capable of drying the surface of a substrate at a uniform evaporation rate by decreasing a temperature difference between the end and the center of the large substrate, when drying by evaporating a solvent component from paste applied to the substrate. SOLUTION: The drier 25 dries a coating film of thick film paste applied to the large substrate 20, and has a heating section 26 and a conveying section 27 for conveying the substrate 20 coated with the paste. The heating section 26 has an upper heater 30 and a lower heater 31 that are constituted of heater units of a plurality of far-infrared radiators and are arranged at least on the upper face and the lower face of the substrate 20, and heats and dries a plurality of regions constituting the large substrate 20 while individually controlling far-infrared radiant intensity from the far-infrared radiators of the upper heater 30 and the lower heater 31. COPYRIGHT: (C)2007,JPO&INPIT
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