| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide wiring structure of a piezoelectric element reducing load to an electrode part, a piezoelectric actuator having this wiring structure, and electronic equipment. <P>SOLUTION: A positive electrode wiring part 21, a negative electrode wiring part 23, and a grounding wiring part 25 are formed of first to third insulation layers 27-29 and first to third conductive layers 31-33 having high elastic modulus. Thus, lowering of vibration characteristics and flexing factor of the first and second piezoelectric elements 13, 15 can be reduced caused by formation of the positive electrode wiring part 21, negative electrode wiring part 23, and grounding wiring part 25. Conductive paste can be cured by locally heating it by a heat light source like laser beam, therefore, the paste can be adhered to first-fourth positive electrode parts A1-A4 and first-fourth negative electrode parts B1-B4 without having affect on polarization performance of the first and second piezoelectric elements 13, 15. <P>COPYRIGHT: (C)2007,JPO&INPIT |
