| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas analyzing method which enables the simple analysis of an OF<SB>2</SB>gas and simple confirmation and measurement of the presence and content of individual components especially in a mixed gas wherein an F<SB>2</SB>gas and the OF<SB>2</SB>gas coexist. <P>SOLUTION: With respect to the presence and individual content of the F<SB>2</SB>gas or the OF<SB>2</SB>gas in the mixed gas containing at least one kind of the F<SB>2</SB>gas and the OF<SB>2</SB>gas, (1) the OF<SB>2</SB>gas in the mixed gas is confirmed by the detection of absorption in an absorption wave number of 700-900 cm<SP>-1</SP>in the analysis of an infrared absorption spectrum to measure the amount of the OF<SB>2</SB>gas and (2) the mixed gas is introduced into a KI aqueous solution, and I<SB>2</SB>liberated by its contact absorption is titrated by Na<SB>2</SB>S<SB>2</SB>O<SB>3</SB>to measure the adding-up amount of the F<SB>2</SB>gas and the OF<SB>2</SB>gas, or the F<SB>2</SB>gas in the mixed gas is confirmed by an analyzing method due to chemical luminescence, and its amount is measured to perform the qualitative analysis and quantitative analysis of the F<SB>2</SB>gas or the OF<SB>2</SB>gas. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
