发明名称 |
SUBSTRATE SUPPORT LIFT MECHANISM |
摘要 |
An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.
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申请公布号 |
US2006240542(A1) |
申请公布日期 |
2006.10.26 |
申请号 |
US20060426555 |
申请日期 |
2006.06.26 |
申请人 |
SCHIEVE ERIC W;KOAI KEITH K;OR DAVID T;CORREA RENE T |
发明人 |
SCHIEVE ERIC W.;KOAI KEITH K.;OR DAVID T.;CORREA RENE T. |
分类号 |
C12M1/34;C23C16/458;H01L21/687 |
主分类号 |
C12M1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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