摘要 |
<p>A probe (10) is composed of a beam section (11), which is formed in a bent planar L-shape with a supporting section (12) and a column section (13), and a contact (14), which is arranged at one end of the column section (13) to extend in the same direction as the direction in which the column section (13) extends. Both the supporting section (12) and the column section (13) are, for instance, formed of nickel or a nickel alloy having a substantially uniform thickness of approximately 70-80µm. The contact (14) has a board shape thinner than the beam section (11), and is formed of a nickel or a nickel alloy having a substantially uniform thickness of approximately 10-20µm. The contact (14) is formed to have a sharp leading edge section.</p> |
申请人 |
TOKYO ELECTRON LIMITED;OCTEC INC.;HOSHINO, TOMOHISA;HASHIMOTO, HIROYUKI;HARADA, MUNEO;OKUMURA, KATSUYA |
发明人 |
HOSHINO, TOMOHISA;HASHIMOTO, HIROYUKI;HARADA, MUNEO;OKUMURA, KATSUYA |