发明名称 DESTATICIZING METHOD, DESTATICIZER, AND ANTISTATIC METHOD OF GLASS SUBSTRATE, AND ANTISTATIC DEVICE OF GLASS SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a destaticizing method and a destaticizer which carry out effective destaticizing to an insulator by a simple and efficient method. SOLUTION: A hard X-ray generator 5 which irradiates hard X-rays from perpendicular direction on the front surface of an insulator 10 is provided. The hard X-ray generator 5 irradiates hard X-rays of 0.05Åor more and less than 1Å. The hard X-rays ionize the air on the front surface of the insulator 10 and destaticizes charges on the front surface of the insulator 10, and the transmission X-rays which have transmitted the insulator 10 destaticize the charges on the rear surface of the insulator 10. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006294602(A) 申请公布日期 2006.10.26
申请号 JP20060069108 申请日期 2006.03.14
申请人 X-RAY PRECISION INC;OMRON CORP 发明人 HOSOKAWA YOSHINORI;OKAMOTO SHIGEO;MASUDA MASAYUKI;KOIZUMI HARUYUKI
分类号 H05F3/04;H01L21/677;H05F3/06 主分类号 H05F3/04
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