发明名称 |
DESTATICIZING METHOD, DESTATICIZER, AND ANTISTATIC METHOD OF GLASS SUBSTRATE, AND ANTISTATIC DEVICE OF GLASS SUBSTRATE |
摘要 |
PROBLEM TO BE SOLVED: To provide a destaticizing method and a destaticizer which carry out effective destaticizing to an insulator by a simple and efficient method. SOLUTION: A hard X-ray generator 5 which irradiates hard X-rays from perpendicular direction on the front surface of an insulator 10 is provided. The hard X-ray generator 5 irradiates hard X-rays of 0.05Åor more and less than 1Å. The hard X-rays ionize the air on the front surface of the insulator 10 and destaticizes charges on the front surface of the insulator 10, and the transmission X-rays which have transmitted the insulator 10 destaticize the charges on the rear surface of the insulator 10. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2006294602(A) |
申请公布日期 |
2006.10.26 |
申请号 |
JP20060069108 |
申请日期 |
2006.03.14 |
申请人 |
X-RAY PRECISION INC;OMRON CORP |
发明人 |
HOSOKAWA YOSHINORI;OKAMOTO SHIGEO;MASUDA MASAYUKI;KOIZUMI HARUYUKI |
分类号 |
H05F3/04;H01L21/677;H05F3/06 |
主分类号 |
H05F3/04 |
代理机构 |
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地址 |
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